Hitachi Chemical Co. America, Ltd.

Glass-like Carbon

Glass-like Carbon has a pore-free and amorphous structure like that of glass and combines the features of carbon with those of glass.

It has a high corrosion resistance, high hardness, high uniformity, and less particle.
Considering the characteristics, Glass-like Carbon is used in Semiconducor Manufacturing Process, heat treatment Process etc.

Features

  • High Thermal Resistance
  • High Corrosion Resistance
  • High Erosion Resistance
  • High Uniformity
  • High Hardness
  • High Purity
  • Low Coefficient of thermal expansion

Characteristics

  Unit Glass-like Carbon Quartz Aluminum
 Bulk Density kg/m3 1,530 2,200 2,700
 Bending Strength MPa 150 50 -
 Tensile Strength MPa - - 205
 Young's Strength GPa 23 73 69
 Shore Modulus - 127 - -
 Specific Resistance Ω−m 4.4 × 10 –5 - -
 Cofficient of thermal expansion X ~10–6/ºC 3.7 0.5 21.0
 Specific Heat J/gK 0.75 0.8 0.9
 Thermal Conductivity W/mK 7 1.3 203
 Urity (Ash Content) ppm 10 ≧ - -