Hitachi Chemical Co. America, Ltd.

CMP Slurry <HS Series>

FEOL Application

Hitachi Chemical is a leading company of CeO2 slurry for STI. "GPX" is excellent for polishing and it is suitable for finer patterns.

BEOL Application

"GPX" has two types: HS-C series for Cu and HS-T series for barrier metals. The polishing performance is controllable for various processes and devices.